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    Advanced Lithography EUV Scanner

    Imec EU Pilot line NV

    Advanced Lithography EUV Scanner

    1. Questions deadline

      20. jan. kl. 11:0020. januar 2026 kl. 11:00

    2. Tender submission deadline

      3. feb. kl. 11:003. februar 2026 kl. 11:00

    3. Contract start date

      30. april kl. 22:0030. april 2026 kl. 22:00

    4. Tender validity period

      3. mai kl. 10:003. mai 2026 kl. 10:00

    5. Result notice published

      21. mai kl. 20:0021. mai 2026 kl. 20:00

    Brief

    Belgium: Tenders/Imec EU Pilot line NV/Advanced Lithography EUV Scanner

    Awarded

    The competition has ended and a winner has been selected.

    Brief

    Laboratorie- og analyseutstyr

    Imec EU Pilot line NV heeft een overeenkomst gesloten met ASML NL voor de levering van een geavanceerde EUV-scanner met lage NA. Deze scanner is bedoeld voor de verkenning en verdere uitbreiding van EUV-patronen, met behulp van experimentele materialen en nieuwe ontwerpen voor logische en geheugenapparaten. Naast de resolutie zijn verbeterde overlayprestaties en doorvoer cruciaal voor de voortdurend evoluerende halfgeleiderapparaten. Er is één bod ontvangen.

    Result

    Winner
    ASML NL
    Number of bids
    1
    Contract value
    €0

    About the bid

      The Low NA scanner is a state-of-the-art EUV scanner enabling exploration and further expansion of the EUV patterning, using exploratory materials and novel designs, in the logic and memory devices. Next to the resolution the low NA-scanner can give the improved overlay performance and throughput are crucial for the continuous evolving semiconductor devices.

      Contact phone
      +32 16287789
      Contact email
      tom.wauters@imec.be
      Address
      Kapeldreef 75, 3001 Heverlee

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    Award Criteria

    • Description

      See tender documents

    Qualification requirements

      Found no qualification requirements in the contract notice.

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    See the full notice

    Contracting authority
    Imec EU Pilot line NV
    Title
    Advanced Lithography EUV Scanner
    Type
    ResultPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Supplemental codes added by Cobrief

    38520000Scanners
    38540000Machines and apparatus for testing and measuring
    38970000Research, testing and scientific technical simulator
    Location
    Arr. Leuven

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