Automated TEM Analysis Platform
Awarded
The competition has ended and a winner has been selected.
Imec EU Pilot line NV has entered into an agreement with FEI EUROPE BV for the supply and commissioning of two 300 mm full wafer automated TEM sample preparation tools. These tools are required to load 300mm wafers and perform high-accurate automated TEM sample preparation, including full automated preparation of quality and ultra-thin samples (sub 20nm) with nanometer-range precision for automated end-pointing on specific structures. In-system gas injection for carbon, TEOS, and tungsten deposition is also required. The delivery will take place in Arr. Leuven. Only one bid was received for this contract.
Result
- Winner
- FEI EUROPE BV
- Number of bids
- 1
- Contract value
- €0
About the bid
- Contact phone
- +32 16287789
- Contact email
- tom.wauters@imec.be
- Address
- Kapeldreef 75, 3001 Heverlee
The object of this tender is the supply and commissioning of 2 300 mm full wafer automated TEM sample preparation tool. Both tools should be able to load 300mm wafers and allow for high-accurate automate TEM sample preparation. Both tools should be able to do full automated sample preparation of quality and ultra-thin samples (sub 20nm). Automated end-pointing of the TEM sample needs to be precise within nanometer range on a specific structure. In-system gas injection for carbon, TEOS and tungsten deposition is required.
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Description
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See the full notice
- Contracting authority
- Imec EU Pilot line NV
- Title
- Automated TEM Analysis Platform
- Type
- Main code
- Supplemental codes
- Location
- Arr. Leuven
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