FAB FIB SEM
Awarded
The competition has ended and a winner has been selected.
Laboratorie-, optisk- og presisjonsutstyr
Imec EU Pilot line NV heeft een overeenkomst gesloten met FEI EUROPE BV - Branch Belgium voor de levering van een 300mm wafer ultra-hoge resolutie focused ion beam scanning elektronenmicroscoop (FIB-SEM) systeem. Het systeem moet nanometer-schaal beeldvorming van een dwarsdoorsnede en de voorbereiding van nauwkeurig gelokaliseerde en dunne TEM lamellen mogelijk maken, met een vereiste dikte van minder dan 30nm. Het apparaat moet 300mm wafers kunnen laden en meerdere TEM-roosters op het podium kunnen plaatsen, met in-systeem gasinjectie voor koolstof- en wolfraamafzetting. Automatisering voor dwarsdoorsnede-analyse en TEM-monstervoorbereiding is vereist. De levering vindt plaats in Arr. Leuven. Er was één inschrijver.
Result
- Winner
- FEI EUROPE BV - Branch Belgium
- Number of bids
- 1
- Contract value
- €0
About the bid
- Contact phone
- +32 16287789
- Contact email
- tom.wauters@imec.be
- Address
- Kapeldreef 75, 3001 Heverlee
We are looking for a 300mm wafer ultra-high resolution focused ion beam scanning electron microscope (FIB-SEM) system. The tool should allow for nanometer scale imaging of a cross-section and preparation of precise located and thin TEM lamellae. End-pointing of the cross section as well as location for the TEM lamella needs to be precise within nanometer range on a specific structure. Final achieved thickness of TEM lamella Is required below 30nm to provide minimal overlap within lamella thickness, while still being crystalline and uncontaminated, ready for TEM inspection. The tool needs to be able to load 300mm wafers and have a possibility to load multiple TEM grids on the stage. Grid position needs to allow for lamella preparation in multiple orientations. In-system gas injection for carbon and tungsten deposition is required. In order to increase speed for our current workflow, the tool needs to be able to use automation to perform cross-section analysis and prepare TEM specimen.
Custom Assessment Criteria
Start a free trial to ask your own questions about the tender and get AI-generated answers.
Award Criteria
Description
See tender documents
Qualification requirements
Found no qualification requirements in the contract notice.
Previous Contract Winners
Start a free trial to see who has won similar tenders for this buyer.
See the full notice
- Contracting authority
- Imec EU Pilot line NV
- Title
- FAB FIB SEM
- Type
- Main code
- Supplemental codes
- Location
- Arr. Leuven
No supplemental codes from buyer…
Supplemental codes added by Cobrief