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    Intellibat ALD Tool

    IMEC VZW

    Intellibat ALD Tool

    1. Competition notice published

      Jan 25, 10:00 PMJanuary 25, 2024 10:00 PM
    2. Change in competition

      Feb 28, 10:00 PMFebruary 28, 2024 10:00 PM
    3. Contract signed

      Oct 15, 12:00 AMOctober 15, 2024 12:00 AM
    4. Result notice published

      Nov 25, 10:00 PMNovember 25, 2024 10:00 PM

    Brief

    Belgium: Tenders/IMEC VZW/Intellibat ALD Tool

    Awarded

    The competition has ended and a winner has been selected.

    Brief

    The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.

    Result

    Winner
    Beneq Oy
    Number of bids
    0
    Contract value
    €550,000

    About the bid

      The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.

      Contact phone
      +32 16287789
      Contact email
      tom.wauters@imec.be
      Address
      Kapeldreef 75, 3001 Heverlee

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    Award Criteria

    • Description

      See tender documents

    Qualification requirements

      Found no qualification requirements in the contract notice.

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    See the full notice

    Contracting authority
    IMEC VZW
    Title
    Intellibat ALD Tool
    Type
    ResultPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Location
    Arr. Leuven

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