Intellibat ALD Tool
Awarded
The competition has ended and a winner has been selected.
The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.
Result
- Winner
- Beneq Oy
- Number of bids
- 0
- Contract value
- €550,000
About the bid
- Contact phone
- +32 16287789
- Contact email
- tom.wauters@imec.be
- Address
- Kapeldreef 75, 3001 Heverlee
The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.
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Award Criteria
Description
See tender documents
Qualification requirements
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See the full notice
- Contracting authority
- IMEC VZW
- Title
- Intellibat ALD Tool
- Type
- Main code
- Supplemental codes
- Location
- Arr. Leuven
No supplemental codes from buyer…