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    PVD for MRAM

    Imec EU Pilot line NV

    PVD for MRAM

    1. Competition notice published

      Feb 27, 10:00 PMFebruary 27, 2025 10:00 PM

    2. Change in competition

      Mar 30, 8:00 PMMarch 30, 2025 8:00 PM

    3. Contract signed

      Dec 14, 12:00 AMDecember 14, 2025 12:00 AM

    4. Result notice published

      Mar 5, 10:00 PMMarch 5, 2026 10:00 PM

    Brief

    Belgium: Tenders/Imec EU Pilot line NV/PVD for MRAM

    Awarded

    The competition has ended and a winner has been selected.

    Brief

    Laboratorie-, optisk- og presisjonsutstyr

    Imec EU Pilot line NV has entered into an agreement with IMEC International for the delivery of a 300mm wafer compatible, multi-chamber PVD platform designed for high throughput of magnetic tunnel junctions. The platform must support multi-cathode PVD chambers, a pre-clean chamber, degass/annealing capability, and a cryogenic stage option. It must also be compatible with Front Opening Universal Pods with a 25-slot capacity, including an Equipment Front End Module and load-lock system, and feature computer-controlled and automated deposition. An optional requirement is compatibility with automatic recipe upload from fab management software via a standardized protocol like SECS/GEM.

    Result

    Winner
    IMEC International
    Number of bids
    5
    Contract value
    €0

    About the bid

      A 300mm wafer compatible, multi-chamber PVD platform designed for high throughput of magnetic tunnel junctions. Additionally, the following PVD and process chamber designs that must be supported are: 1) Multi-cathode PVD chamber 2) a pre-clean chamber to remove native oxides and other contaminants, 3) degass/annealing capability and, 4) a cryogenic stage (<100K) option in, or ex, situ of the PVD modules. Furthermore, the platform must be compatible with Front Opening Universal Pods with a 25-slot capacity, including an Equipment Front End Module and load-lock system for wafer loading. Finally, the deposition must be computer controlled and automated following defined recipes. As an optional, the platform should be compatible with automatic recipe upload from fab management software via a standardized protocol, for example SECS/GEM.

      Contact phone
      +32 16287789
      Contact email
      tom.wauters@imec.be
      Address
      Kapeldreef 75, 3001 Heverlee

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    Award Criteria

    • Description

      See tender documents

    Qualification requirements

      Found no qualification requirements in the contract notice.

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    See the full notice

    Contracting authority
    Imec EU Pilot line NV
    Title
    PVD for MRAM
    Type
    ResultPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Supplemental codes added by Cobrief

    38800000Industrial process control equipment and remote-control equipment
    38810000Industrial process control equipment
    42942200Vacuum ovens
    Location
    Arr. Leuven

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