Semi-Automatic Wafer Grinder
Awarded
The competition has ended and a winner has been selected.
Anleggsmaskiner og utstyr
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY har inngått en avtale med DISCO HI-TEC EUROPE GmbH om å levere en semi-automatisk wafer-sliper med manuell lasting og lossing av wafere på chuck-bordet. Utstyret skal kunne tynne Si, SiC, LiNbO3 og andre typiske halvledende wafere med en diameter på 200 og 300 mm til varierende tykkelser med endepunktkontroll, TTV-profilkontroll, og mulighet til å tynne wafere ned til 10 µm tykkelse med støttetape, samt mulighet til å slipe kun en bestemt avstand fra kant til senter. Utstyret må være nytt og overholde standard sikkerhets- og kontaminasjonskrav for renromsutstyr. Leveransen skal skje i Helsinki-Uusimaa, med en varighet på 2 år, til en verdi av 325 000 euro. Det ble mottatt ett tilbud i konkurransen.
Result
- Winner
- Disco HiTec Europe GmbH
- Number of bids
- 1
- Contract value
- €325,000
About the bid
- Contact name
- VTT Technical Research Centre of Finland Ltd
- Contact phone
- +358 20722111
- Contact email
- kilpailutus@vtt.fi
- Address
- PL 1000, 02044 VTT
The object of the tender was a Semi-Automatic Wafer Grinder with manual wafer loading and unloading on the chuck table (later also “Equipment”), capable of thinning Si, SiC, LiNbO3 and other typical semi-conducting wafers of 200 and 300 mm diameter to varying thicknesses with end-point control, TTV profile control, capability to thin wafers down to 10um thickness with supporting tape and capability to grind only a determined distance from edge-to-center. Equipment had to be new. The tool had to comply with cleanroom equipment standard safety and contamination requirements. The object of the tender process was described in more detail in the invitation to tender documents.Main features of the procedureThe tender process was based on the open procedure applicable to contracts that exceed the EU procurement threshold.
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Award Criteria
Description
The evaluation of the tenders was described in section 'Grounds for decision'.
Qualification requirements
Found no qualification requirements in the contract notice.
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See the full notice
- Contracting authority
- TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Title
- Semi-Automatic Wafer Grinder
- Type
- Main code
- Supplemental codes
- Location
- Helsinki-Uusimaa
- Duration
- 24 months
No supplemental codes from buyer…