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    BEOL ETCH PLATFORM

    Imec EU Pilot line NV

    BEOL ETCH PLATFORM

    1. Competition notice published

      Feb 27, 10:00 PMFebruary 27, 2025 10:00 PM

    2. Change in competition

      Mar 30, 8:00 PMMarch 30, 2025 8:00 PM

    3. Contract start date

      Sep 1, 12:00 AMSeptember 1, 2025 12:00 AM

    4. Contract signed

      Sep 1, 12:00 AMSeptember 1, 2025 12:00 AM

    5. Result notice published

      Sep 28, 8:00 PMSeptember 28, 2025 8:00 PM

    6. Contract end date

      Dec 31, 12:00 AMDecember 31, 2028 12:00 AM

    Brief

    Belgium: Tenders/Imec EU Pilot line NV/BEOL ETCH PLATFORM

    Awarded

    The competition has ended and a winner has been selected.

    Brief

    Laboratorie-, optisk- og presisjonsutstyr

    Imec EU Pilot line NV has entered into an agreement with LAM Research International for the supply and commissioning of a new BEOL Etch Cluster in Arr. Leuven, Belgium. This includes a 300mm Dry Etch/Strip Platform with three process modules: a Metal Dry Etcher for metal, metal oxides, and hard mask etches; a Deep Si Etcher for TSV; and a Dry Stripper or Asher with water vapor passivation capability. These modules are intended for various BEOL applications from legacy technology nodes up to N3 and beyond. The contract was awarded based on the best quality-price ratio, and only one bid was received.

    Result

    Winner
    LAM Research International
    Number of bids
    1
    Contract value
    €0

    About the bid

      Its object is the supply and commissioning of a new BEOL Etch Cluster. • 300mm Dry Etch/Strip Platform containing 3 Process Modules as described below: • Metal Dry Etcher capable of Metal, Metal Oxides and various HM (Hard Mask) etches • Deep Si Etcher capable of TSV (Through-Silicon Via) • Dry Stripper or Asher with water vapor passivation capability These Process Modules are targeted for various BEOL Applications from legacy technology nodes up to N3 and beyond. The contract will be awarded based on the best quality-price ratio, the award criteria will be further detailed in the tender documents.

      Contact phone
      +32 16287789
      Contact email
      tom.wauters@imec.be
      Address
      Kapeldreef 75, 3001 Heverlee

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    Award Criteria

    • Description

      Prijs

    Qualification requirements

      Found no qualification requirements in the contract notice.

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    See the full notice

    Contracting authority
    Imec EU Pilot line NV
    Title
    BEOL ETCH PLATFORM
    Type
    ResultPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Supplemental codes added by Cobrief

    38540000Machines and apparatus for testing and measuring
    38800000Industrial process control equipment and remote-control equipment
    38810000Industrial process control equipment
    Location
    Arr. Leuven

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