CONTRACT AWARD NOTICE: Optical film stress measurement tool
Awarded
The competition has ended and a winner has been selected.
- Award
- Quality comparison 20%
- Procedure
- OpenSingle stage
- Agreement
- Buying goodsover 15 months
Brief
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY has entered into an agreement with LOT-Quantum Design GmbH for the delivery of a 200 mm automated film stress and wafer bow analysis system for the VTT Micronova cleanroom in Helsinki-Uusimaa. The contract has a duration of 15 months and a value of 660,000 €. The system includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle wafers, programmable automatic wafer scanning system, and analysis software, designed for use inside the cleanroom for non-patterned, non-texture 200 mm wafer stress measurement. Two bids were received for this contract.
Laboratorie- og analyseutstyr
Result
- LOT-Quantum Design GmbHWinner
- FSMGBidder
- 2Number of bids
- €660,000Contract value
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Description
See call for tenders
Source
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Description
See call for tenders
Source
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From the notice
This is a contract award notice under the Finnish Act on Public Procurement and Concession Contracts, setting out the outcome of the procurement. THE OBJECT OF THE TENDER PROCESS The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement. The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”). A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting. A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. Partial tenders will not be accepted. NON-MANDATORY OPTIONAL FEATURES Please see Annex 1 section 3.4.10 of the invitation to tender. The tenderer may offer the feature as an optional item in its tender. PLEASE NOTE: the optional item shall not be included in the comparison price of the device but shall be priced separately.Main features of the procedureThe tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold.
Contact
VTT Technical Research Centre of Finland Ltdkilpailutus@vtt.fi- ResultType
- Helsinki-UusimaaLocation
- 38000000Main codeLaboratory, optical and precision equipments (excl. glasses)
- 38400000Instruments for checking physical characteristics38540000Machines and apparatus for testing and measuring38600000Optical instruments