Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
Laboratorie-, optisk- og presisjonsutstyr
Danmarks Tekniske Universitet - DTU needs a high ion density etcher for lithium niobate on insulator 150 mm wafer processing, to be delivered and installed in the DTU Nanolab cleanroom in Nordsjælland no later than Q4 2027. The instrument must be highly versatile, providing stable etch recipes capable of etching at both nanometer and micrometer scales with precise depth control, and state-of-the-art performance in profile control, uniformity, selectivity, and sidewall smoothness for low waveguide loss. The award criteria are Price (20%) and Quality, Functionality and Performance (80%). Tenderers must provide at least 3 relevant references, not more than 5 years old, for comparable agreements involving the delivery, installation, and servicing of a substantially equivalent High ion density plasma etcher for etching of lithium niobate on insulator.
About the bid
- Contact name
- Mikkel Taanum
- Contact phone
- +45 20133820
- Contact email
- miktaa@dtu.dk
- Address
- Anker Engelunds Vej 1, 2800 Kgs. Lyngby
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.
Custom Assessment Criteria
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Award Criteria
Description
Based on the offered prices
Description
Based on the tenderers answers to Appendix 1
Qualification requirements
Description
Leverandøren må vise at den har teknisk og faglig evne til å oppfylle kontrakten. Leverandøren må demonstrere dette ved å oppgi minst 3 relevante referanser for sammenlignbare avtaler, som viser at leverandøren tidligere har levert, installert og utført service på en høydensitets plasmaetsingsmaskin for etsing av litiumniobat på isolator, som i det vesentlige tilsvarer instrumentet. Avtalen, som referansen viser til, må ikke være eldre enn 5 år. Datoen beregnes fra siste leveringsdato for maskinen under avtalen i referansen.
Documentation Requirement
Leverandøren må oppgi minst 3 relevante referanser for sammenlignbare avtaler.
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See the full notice
- Contracting authority
- Danmarks Tekniske Universitet - DTU
- Title
- Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
- Type
- Main code
- Supplemental codes
- Location
- Nordsjælland