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    Electron Beam Lithography (EBL) Tool

    Lunds universitet

    Electron Beam Lithography (EBL) Tool

    1. Competition notice published

      Oct 5, 5:04 PMOctober 5, 2026 5:04 PM

    2. Tender validity period

      Nov 5, 10:59 PMNovember 5, 2026 10:59 PM

    3. Tender submission deadline

      Nov 5, 10:59 PMNovember 5, 2026 10:59 PM

    4. Contract start date

      Dec 1, 12:00 AMDecember 1, 2026 12:00 AM

    5. Contract end date

      Mar 15, 12:00 AMMarch 15, 2028 12:00 AM

    Brief

    Sweden: Tenders/Lunds universitet/Electron Beam Lithography (EBL) Tool
    Brief

    Laboratorie-, optisk- og presisjonsutstyr

    Lunds universitet needs an Electron Beam Lithography (EBL) Tool, including associated costs such as warranty, installation, training, and support, for a maximum total value of 26 million SEK. The instrument is intended for high-resolution, repeatable patterning with a large writing field and automated self-calibration routines, capable of handling samples from small pieces to 8" wafers, to be delivered in Skåne län. The award criterion is price.

    About the bid

      Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.

      Contact name
      Maria Plaschke
      Contact phone
      +462220000
      Contact email
      maria.plaschke@eken.lu.se
      Address
      Box 188, 221 00 Lund

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    Award Criteria

    • Description

      Price

    Qualification requirements

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    See the full notice

    Contracting authority
    Lunds universitet
    Title
    Electron Beam Lithography (EBL) Tool
    Type
    CompetitionPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Supplemental codes added by Cobrief

    38511000Electron microscopes
    38511100Scanning electron microscopes
    38580000Non-medical equipment based on the use of radiations
    Location
    Skåne län
    Estimated value
    SEK 26,000,000.00

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