Search
  • Search

    Prior information notice: Cluster sputtering tool

    TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

    Prior information notice: Cluster sputtering tool

    1. Planning notice published

      11. mars kl. 13:3511. mars 2026 kl. 13:35

    2. Qualification deadline

      31. mars kl. 21:0031. mars 2026 kl. 21:00

    Brief

    Finland: Tenders/TEKNOLOGIAN TUTKIMUSKESKUS VTT OY/Prior information notice: Cluster sputtering tool

    Expired

    The competition has expired without a winner being announced.

    Brief

    Laboratorie- og analyseutstyr

    Teknologian tutkimuskeskus VTT Oy planlegger anskaffelsen av et klyngesputterverktøy for VTT Micronova renrommet, som må inkludere co-sputtering-kapasitet med flere mål for dobbeltsidig belagte wafere og waferbærere, samt mulighet for fremtidig utvidelse med minst to ekstra prosesskamre. Dette er kun en forhåndsinformasjon, og leverandører skal ikke levere tilbud eller uttrykke interesse på dette stadiet.

    About the bid

      This notice constitutes solely a prior information notice pursuant to Section 57 of the Finnish Public Procurement Act, issued for the purpose of shortening the time limits of the forthcoming procurement procedure. PLEASE NOTE: For technical reasons, it has been necessary to indicate a tender submission period in this notice; however, tenders should not to be submitted in response to this notice, nor is there any requirement to express interest in participating at this stage. The contracting authority intends to apply an open procurement procedure (Finnish Public procurement act, 32§), in which all economic operators may submit their tenders when the invitation to tender has been published. The selection criteria will be defined in the invitation to tender. PRIOR INFORMATION NOTICE The contracting authority (VTT) here states that, due to urgency, it is practically impossible to comply with the standard deadlines for the open procedure set in section 56 § of the Finnish Public Procurement Act . The contracting authority aims to publish the invitation to tender as soon as possible, during the spring of 2026, but it is not committed to any specific date. The time limit for submitting the tenders will be shortened so that tendering period will be at least 15 days (section 57 §). The justified reasons for urgency and therefore shortening the deadlines are as follows: The procurement will be financed as part of a larger EU-wide research project, which VTT will be joining. The project schedule and funding conditions determine the timeline within which the procurements must be carried out. The project schedule and funding conditions are not determined solely by VTT. VTT’s funding depends on the successful completion of the procurements within the overall project schedule and on the equipment being deployed within the given timeframe. For this reason, the contracting entity has decided to shorten the deadlines for procurement procedure set in 56 §, to ensure that it can fulfill its obligations within the specified schedule. SCOPE OF THE BECOMING PROCUREMENT PROCEDURE The object of the procurement is a cluster sputtering tool for the VTT Micronova cleanroom. It must include co-sputtering capability with multiple targets for double-side coated wafers and wafer carriers. Furthermore, it must be possible to extend the system in future by adding at least two additional process chambers. The subject of the procurement will be defined in more detail in the procurement documents.

      Contact name
      VTT Technical Research Centre of Finland Ltd
      Contact phone
      +358 20722111
      Contact email
      kilpailutus@vtt.fi
      Address
      PL 1000, 02044 VTT

    Custom Assessment Criteria

    Start a free trial to ask your own questions about the tender and get AI-generated answers.

    Award Criteria

    • Description

      To be determined

    Qualification requirements

      Found no qualification requirements in the contract notice.

    Previous Contract Winners

    Start a free trial to see who has won similar tenders for this buyer.

    See the full notice

    Contracting authority
    TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
    Title
    Prior information notice: Cluster sputtering tool
    Type
    PlanningPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Supplemental codes added by Cobrief

    38400000Instruments for checking physical characteristics
    38500000Checking and testing apparatus
    42942200Vacuum ovens
    Duration
    12 months

    Active similar competitions

    • TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

      Laboratorie- og analyseutstyr

      Request for information: Electrochemical sensor activation line

      VTT Technical Research Centre of Finland Ltd is planning the procurement of an electrochemical sensor activation line suitable for mid-range production volumes, which includes automated dispensing and electroactivation/electrical characterization modules. Suppliers can provide feedback by submitting a reply, including a filled-in "User requirement specification list" (Annex 2), information on optional items, references of similar deliveries, and a filled-in Annex 3 on corporate social responsibility, either through the Supplier Portal or by email.

      Planning19. okt. 2026

    • Fraunhofer-Gesellschaft - Einkauf B12

      Laboratorieutstyr og analyseinstrumenter

      High Temperature 200 mm Ion Implanter - PR1293607-2790-W

      Fraunhofer-Gesellschaft - Einkauf B12 needs a High Temperature 200 mm Ion Implanter for delivery in Erlangen, Kreisfreie Stadt, over a duration of 12 months. The award criteria are Technical Details (65%) and Price (35%). Suppliers must provide information on turnover for the last 3 financial years.

      Competition with qualification7. okt. 2026
      9. nov. 2026(11 days)

    • Danmarks Tekniske Universitet - DTU

      Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics

      Danmarks Tekniske Universitet - DTU needs an ICP Reactive ion etcher for silicon dielectrics, to be delivered and installed in the DTU Nanolab cleanroom in the Copenhagen area. The instrument must support the full spectrum of etching of silicon-based dielectrics, from sub 100 nm nanostructures to depths of several tens of microns, requiring exceptional process controllability and tunability for ultra-precise, low-rate etches (< 100 nm/min) and high etch rate deep etches (approaching 500 nm/min). It must accommodate all silicon dielectrics of the form SixNy, SixOx, and SixOyNz, and be compatible with mask materials including Si, Cr, e-beam resists, and UV/DUV photoresists with high mask selectivity. The instrument must be configured for 150 mm wafer processing, with an option for a complete kit for 200 mm wafer processing. DTU will also have the option to purchase one additional identical instrument. Award criteria are Functionality and performance (50%), Quality of submitted samples (30%), and Price (20%).

      Competition8. okt. 2026
      23. nov. 2026(25 days)

    • INL - INTERNATIONAL IBERIAN NANOTECHNOLOGY LABORATORY

      Laboratorie- og analyseutstyr

      STANDARD AND TECHNICAL SPECIFICATIONS TO GOVERN THE CONTRACT FOR THE SUPPLY AND INSTALLATION OF AN INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING (ICP-RIE) SYSTEM

      INL - INTERNATIONAL IBERIAN NANOTECHNOLOGY LABORATORY needs the supply and installation of a high-performance Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system for micro- and nanofabrication. The contract involves the supply, installation, commissioning, acceptance testing, and training related to this scientific equipment, which will be delivered in Cávado, Portugal.

      Competition8. okt. 2026
      16. nov. 2026(18 days)

    • Danmarks Tekniske Universitet - DTU

      Laboratorie-, optisk- og presisjonsutstyr

      The procurement of the Supply, Installation and Commissioning of a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) with Gallium Ion Source

      Danmarks Tekniske Universitet (DTU) needs the supply, delivery, installation, commissioning, and acceptance of one focused ion beam scanning electron microscope (FIB-SEM) dual-beam platform. This instrument will serve a multi-user research environment in the Copenhagen area for high-resolution surface imaging, site-specific cross-sectioning, TEM lamella preparation (including automated workflows), 3D FIB-SEM tomography, gas-assisted deposition and etching, nanoscale manipulation, and elemental microanalysis by energy-dispersive X-ray spectroscopy (EDS) and ToF-SIMS. The award criteria are Price (30%) and Quality of the solution (70%). Suppliers must provide at least 3 references for comparable agreements, each with a value of at least DKK 10,000,000, concerning the supply, delivery, installation, commissioning, and acceptance of a FIB-SEM dual-beam platform or a comparable service, with the agreement not being more than 5 years old.

      Competition14. okt. 2026
      16. nov. 2026(18 days)