Prior Information Notice – Eddy Current Wafer Mapping System
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Anleggsmaskiner og utstyr
Das Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, plant die Beschaffung eines Wirbelstrom-Wafer-Mapping-Systems zur zerstörungsfreien elektrischen Charakterisierung von Halbleiterwafern während der Verarbeitung, einschließlich Flächenwiderstands- und Leitfähigkeitsmessungen. Das System soll die Prozessüberwachung und Qualitätskontrolle in der fortschrittlichen Halbleiterfertigung unterstützen. Der geschätzte maximale Gesamtauftragswert beträgt 248.000 EUR.
About the bid
- Contact name
- Kerstin Tobis
- Contact phone
- 03063928384
- Contact email
- kerstin.tobis@fhb-berlin.de
- Address
- Gustav-Kirchhoff-Straße 4, 12489 Berlin
The Ferdinand-Braun-Institut (FBH) plans to procure an eddy current wafer mapping system within the framework of the EU-funded APECS programme. The system will be used for non-destructive electrical characterisation of semiconductor wafers during processing, including sheet resistance and conductivity measurements. It is intended to support process monitoring and quality control in advanced semiconductor manufacturing. The equipment shall enable automated, high-resolution mapping of wafers up to 200 mm in diameter and provide fast feedback on process uniformity and material properties. It will be installed in a cleanroom environment and integrated into existing process workflows. The procurement procedure is planned for 2026.
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See the full notice
- Contracting authority
- Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik
- Title
- Prior Information Notice – Eddy Current Wafer Mapping System
- Type
- Main code
- Supplemental codes
- Estimated value
- €248,000.00
No supplemental codes from buyer…