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    Prior Information Notice – Rapid Thermal Processing Equipment (RTA)

    Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik

    Prior Information Notice – Rapid Thermal Processing Equipment (RTA)

    1. Planning notice published

      Jun 9, 1:29 PMJune 9, 2026 1:29 PM

    2. Planned competition start

      Sep 1, 12:00 AMSeptember 1, 2026 12:00 AM

    Brief

    Germany: Tenders/Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik/Prior Information Notice – Rapid Thermal Processing Equipment (RTA)

    Published deadline passed

    The published deadline has passed. For multi-stage competitions a later tender deadline may still apply — check the notice or portal for the current phase.

    Brief

    Anleggsmaskiner og utstyr

    Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik is planning the procurement of a Rapid Thermal Processing (RTA) system for the processing of 200 mm wafers, to be used for the development and manufacturing of advanced heterogeneous integration technologies. The system will support key process steps such as contact formation, dopant activation, interface engineering, and post-deposition annealing processes. The maximum estimated value of the contract is 593,000 EUR.

    About the bid

      The Ferdinand-Braun-Institut (FBH) plans to procure a Rapid Thermal Processing (RTA) system for the processing of 200 mm wafers within the framework of the EU-funded APECS programme. The system will be used for the development and manufacturing of advanced heterogeneous integration technologies (InP-on-Si / BiCMOS). In particular, it will support key process steps such as contact formation, dopant activation, interface engineering, and post-deposition annealing processes. The equipment is intended for installation and operation in an existing cleanroom environment and must be compatible with standard semiconductor processing requirements. The procurement procedure is planned for 2026. This prior information notice is published to inform the market about the planned procurement and may be used to enable the application of shortened time limits in subsequent procurement procedures.

      Contact name
      Kerstin Tobis
      Contact phone
      +493063928384
      Contact email
      vergabe@fbh-berlin.de
      Address
      Gustav-Kirchhoff-Straße 4, 12489 Berlin

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    See the full notice

    Contracting authority
    Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik
    Title
    Prior Information Notice – Rapid Thermal Processing Equipment (RTA)
    Type
    Planning
    Main code
    42990000Miscellaneous special-purpose machinery
    Supplemental codes

    No supplemental codes from buyer…

    Location
    Berlin
    Estimated value
    €593,000.00

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