Scanning Electron Microscope

Om anbudet

Oppdragsbeskrivelse

This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterisation tools as one of its core purposes. Due to a recently identified bottleneck in the suite of high-end characterisation in the cleanroom, DTU wishes to acquire a SEM. This problem has arisen as the result of multiple breakdowns among the aging and current instruments thus exposing an unexpected vulnerability in the overall process flow of several of our commercial users. The instrument is intended to meet the characterization requirements of DTU’s key commercial customers. Accordingly, only a high-end system equipped with a field emission source, capable of delivering high emission at low energy spread, will be considered acceptable. The system must provide state-of-the-art lateral image resolution of 0.8 nm or better at an accelerating voltage of 15 kV, and 0.9 nm or better at 1 kV, both achieved without beam deceleration or sample bias and using the in-column secondary electron detector. The SEM must be compatible with samples originating directly from customer production processes and must therefore be capable of handling wafers with diameters of up to 200 mm. Typical substrate materials include silicon, fused silica, and quartz. These materials cannot be coated to reduce charging effects during SEM analysis, and the instrument must therefore be capable of imaging such non-conductive samples without the application of conductive coatings.

Kontaktinformasjon

Kontakt navn

Anna Storch

Kontakt telefon

+45 999999

Kontakt e-post

aasst@dtu.dk

Adresse

Anker Engelunds Vej 1, 2800 Kgs. Lyngby

• Price

  50%

  Beskrivelse

  The price to be evaluated is the total price for the Instrument. DTU uses a linear point scale model to evaluate the tender prices. The linear model implies that the offered prices is converted into points. The offered prices are awarded points on a scale from 0-10.

  Evalueringsmetode

  The offered prices are awarded points on a scale from 0-10.

• Functionality and quality

  10%

  Beskrivelse

  The sub-criterion will be evaluated as described in Instructions to Tenderers.

• Demonstrated performance

  25%

  Beskrivelse

  The sub-criterion will be evaluated as described in Instructions to Tenderers.

• Delivery

  15%

  Beskrivelse

  The sub-criterion will be evaluated as described in Instructions to Tenderers.

• Referanseprosjekter

  Beskrivelse

  The Tenderer must show that it has the technical and professional ability to fulfil the contract. The Tenderer must demonstrate this by providing at least 3 relevant references for comparable agreements, showing that the Tenderer has previously delivered, installed and serviced a Scanning Electron Micro-scope (SEM) substantially equivalent to the Instrument. The agreement, to which the reference refers, must not be more than 5 years old. The date is calculated from the last delivery date of the machine under the agreement in the reference. If the Tenderer cannot comply with the requirement, the Tenderer can rely on the capacities of other entities or make a consortium

  Dokumentasjonskrav

  At least 3 relevant references for comparable agreements, showing that the Tenderer has previously delivered, installed and serviced a Scanning Electron Micro-scope (SEM) substantially equivalent to the Instrument.

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