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Germany: Tenders/Helmholtz-Zentrum Dresden-Rossendorf e.V./Deep Reactive Ion Etching (DRIE) Si fluorine chemistry etcher

  1. Competition notice published

    Mar 24, 1:13 PMMarch 24, 2026 1:13 PM

  2. Contract signed

    Jun 9, 12:00 AMJune 9, 2026 12:00 AM

  3. Result notice published

    Jun 9, 11:46 AMJune 9, 2026 11:46 AM

Brief

Deep Reactive Ion Etching (DRIE) Si fluorine chemistry etcher

Awarded

The competition has ended and a winner has been selected.

Deadline
Jun 8,Expired
Award
Preis 50%
Procedure
OpenSingle stage
Agreement
Buying goodsover 6 months

Brief

Helmholtz-Zentrum Dresden-Rossendorf e.V. has entered into an agreement with SENTECH Gesellschaft für Sensortechnik mbH for the delivery of a Deep Reactive Ion Etching (DRIE) Si fluorine chemistry etcher. The equipment will provide new capabilities for deep trench and through-via etching to the IBC cleanroom, supporting the production of magnetic nanodevices for next-gen European based Artificial Intelligence. The etcher must be capable of operating in an ISO Class 6 cleanroom environment with sample loading in an ISO Class 4/5 environment, and will be installed at the Ion Beam Center, building 711/ room 105, Bautzner Landstraße 400, 01328 Dresden, Germany. The contract has a duration of 6 months and requires a warranty of at least two years.

Laboratorie-, optisk- og presisjonsutstyr

Result

TED
  • SENTECH Gesellschaft für Sensortechnik mbH
    Winner
  • Number of tenders received
    1
  • Contract value
    -€1

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Qualification requirements

  • Description

    according to the criteria of Annex 01A Performance Specification and Price Declaration_EUOV2601.xlsx

    Documentation Requirement

    Ikke spesifisert.

    Source

    No source found in the documents. Check the requirement against the tender documents.

Award Criteria

  • Description

    Criteria in accordance with Annex 01A Performance Specification and Price Declaration_EUOV2601.xlsx

    Source

    No source found in the documents. Check the weight against the tender documents.

  • Description

    Evaluation price according to Annex 01A

    Source

    No source found in the documents. Check the weight against the tender documents.

Previous winners

  • Who are you up against?

    The suppliers who have won similar contracts at Helmholtz-Zentrum Dresden-Rossendorf e.V.

From the notice

  • The equipment to be procured is a Deep Reactive Ion Etching (DRIE) Si fluorine chemistry etcher. This will provide new capabilities of deep trench (Bosch process) and through-via etching to the IBC cleanroom. The equipment is procured through the MagKI investment programme which will provide advanced substrate structuring capabilites to the cleanroom which will be used in the final production of magnetic nanodevices for next-gen European based Artifical Intelligence. It will also offer near vertical sidewall profile of etched via's in Si, SiC as well as 2D materials, like graphene and MoS2. Beside the fulfilment of the criteria described under 2. Performance quote of this Annex A, the scope of deliveries and services includes and are part of the offer: - delivery at the place of usage according to DPU Dresden (Incoterms 2020) Place of usage: - the machine must be capable of operating in a cleanroom environment (ISO Class 6) with the sample loaded in an ISO class 4 / 5 environment. - the footprint, technical drawings, electrical drawings must be supplied in the documentation - user documentation in English and German - delivery, installation and SAT must be possible until 01 June 2027 - warranty of at least two years - place of performance: Helmholtz-Zentrum Dresden-Rossendorf e. V.; Ion Beam Center, building 711/ room 105; Bautzner Landstraße 400; 01328 Dresden - SAT in the cleanroom at the Ion Beam Center, building 711/ room 105. The main body of the tool will be located in a ISO Class 6 service area, the loadlock and control PC will be located in a ISO Class 4 / ISO Class 5 cleanroom - CE-marking

  • Contact

    Abteilung Vergabe- und Beschaffungswesendm-vergabe@hzdr.de
  • Type
    Result
  • Main code
    Laboratory, optical and precision equipments (excl. glasses)
    38000000
  • 38540000Machines and apparatus for testing and measuring38810000Industrial process control equipment51430000Installation services of laboratory equipment

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