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    Defect inspection system

    TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

    Defect inspection system

    1. Competition notice published

      Jun 12, 12:06 PMJune 12, 2026 12:06 PM

    2. Supplier selection

      Aug 17, 12:00 AMAugust 17, 2026 12:00 AM

    3. Contract signed

      Oct 5, 12:00 AMOctober 5, 2026 12:00 AM

    4. Contract start date

      Oct 6, 12:00 AMOctober 6, 2026 12:00 AM

    5. Result notice published

      Oct 13, 7:18 AMOctober 13, 2026 7:18 AM

    Brief

    Finland: Tenders/TEKNOLOGIAN TUTKIMUSKESKUS VTT OY/Defect inspection system

    Awarded

    The competition has ended and a winner has been selected.

    Brief

    Laboratorie- og analyseutstyr

    VTT Technical Research Centre of Finland Ltd has entered into an agreement with Confovis GmbH for the delivery of an automated defect inspection tool for 200 mm and 300 mm patterned wafers, to be delivered in Helsinki-Uusimaa over a period of 14 months, with a final contract value of 1,190,000 €. The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in patterns made of silicon oxides and nitrides, polysilicon, metals, and photoresist. Three bids were received for this contract.

    Result

    Winner
    Confovis GmbH
    Number of bids
    3
    Contract value
    €1,190,000

    About the bid

      VTT is looking to acquire an automated defect inspection tool for 200 mm and 300 mm patterned wafers. The tool will enable rapid tracking of defects that appear during the manufacturing process of functional devices (in-line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of the patterns that the machine must be able to analyze are silicon oxides and nitrides, polysilicon, metals, and photoresist. The object of the tender process and the technical requirements are described in more detail in the invitation to tender documents.Main features of the procedureThe tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold.

      Contact name
      VTT Technical Research Centre of Finland Ltd
      Contact phone
      +358 20722111
      Contact email
      kilpailutus@vtt.fi
      Address
      PL 1000, 02044 VTT

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    Award Criteria

    • Description

      The evaluation of the tenders is described in section 'Grounds for decision'.

    • Description

      The evaluation of the tenders is described in section 'Grounds for decision'.

    Qualification requirements

      Found no qualification requirements in the contract notice.

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    See the full notice

    Contracting authority
    TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
    Title
    Defect inspection system
    Type
    ResultPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes

    No supplemental codes from buyer…

    Supplemental codes added by Cobrief

    38500000Checking and testing apparatus
    38540000Machines and apparatus for testing and measuring
    38810000Industrial process control equipment
    Location
    Helsinki-Uusimaa
    Duration
    14 months

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