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    European Tender Electron Beam Lithography system

    Universiteit Twente

    European Tender Electron Beam Lithography system

    1. Competition notice published

      Jun 12, 10:37 AMJune 12, 2026 10:37 AM

    2. Change in competition

      Jul 8, 4:24 AMJuly 8, 2026 4:24 AM

    3. Tender submission deadline

      Aug 21, 10:00 AMAugust 21, 2026 10:00 AM

    4. Tender validity period

      Nov 19, 11:00 AMNovember 19, 2026 11:00 AM

    Brief

    Netherlands: Tenders/Universiteit Twente/European Tender Electron Beam Lithography system

    Expired

    The competition has expired without a winner being announced.

    Brief

    Laboratorie-, optisk- og presisjonsutstyr

    De Universiteit Twente heeft een aanbesteding uitgeschreven voor de aankoop van een elektronenbundellithografiesysteem. Dit systeem, met een maximale totale waarde van 3,5 miljoen euro, is bedoeld voor het MESA+ Instituut en moet patronen kunnen definiëren in elektrongevoelige resists met hoge resolutie en snelheid. Het systeem moet compatibel zijn met diverse toepassingen en substraten tot 200 mm diameter, en zal worden gebruikt door academische onderzoekers, studenten en industriële ingenieurs met verschillende achtergronden en expertiseniveaus.

    About the bid

      The University of Twente is tendering to purchase an Electron Beam Lithography system. The MESA+ Institute of the University of Twente will invest in a new Electron Beam system (e-beam system). A system, suitable for defining patterns in electron sensitive resists, at high resolution and high speed, compatible with a wide range of applications and substrate types up to 200mm in diameter. The system will be used by a wide range of users, i.e. academic researchers and students as well as industrial engineers with different backgrounds (photonics, (nano)-electronics etc.) and different levels of expertise.

      Contact name
      Camilio Delfgaauw
      Contact phone
      +31534891512
      Contact email
      c.delfgaauw@utwente.nl
      Address
      Drienerlolaan 5, 7522NB Enschede

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    See the full notice

    Contracting authority
    Universiteit Twente
    Title
    European Tender Electron Beam Lithography system
    Type
    CompetitionPrequalification
    Main code
    38000000Laboratory, optical and precision equipments (excl. glasses)
    Supplemental codes
    38341100Electron-beam recorders
    Estimated value
    €3,500,000.00

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