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    Denmark: Tenders/Danmarks Tekniske Universitet - DTU/III-V ICP Etcher

    1. Competition notice published

      Aug 26, 2025 1:04 PMAugust 26, 2025 1:04 PM

    2. Supplier selection

      Oct 29, 2025 12:00 AMOctober 29, 2025 12:00 AM

    3. Contract signed

      Nov 28, 2025 12:00 AMNovember 28, 2025 12:00 AM

    4. Result notice published

      Dec 1, 2025 7:12 AMDecember 1, 2025 7:12 AM

    Brief

    III-V ICP Etcher

    Awarded

    The competition has ended and a winner has been selected.

    Deadline
    Nov 30, 2025Expired
    Award
    Quality of submitted samples and performance evaluation 40% and 1 more
    Procedure
    OpenSingle stage
    Agreement
    Buying goodsover 1 year

    Brief

    Danmarks Tekniske Universitet - DTU har inngått en avtale med Samco Inc om å levere en ICP reaktiv ion etser for etsing av III-V materialer, med spesielt fokus på etsing av GaAs mikropillarenheter fra et plant mikrohulrom. Leveransen skal skje i Københavns omegn, med en prosjektvarighet på 12 måneder og en total verdi på 607 100 €. Det ble lagt vekt på maskinvare, funksjonalitet, tjenester og kvaliteten på innsendte prøver.

    Result

    TED
    • Samco Inc
      Winner
    • Number of bids
      4
    • Contract value
      €607,100

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    Award Criteria

    • Description

      DTU Nanolab will assess if the tender fulfils the specified evaluation requirements to sub-criterion “Quality of submitted samples”, and sub-criteria “Functionality and performance” is based on the Tenderer’s specifications in Appendix 1 – Requirement Specification.

      Source

      No source found in the documents. Check the weight against the tender documents.

    • Description

      The performance evaluation is based on the returned samples: The provided samples shall show evidence of the Tenderers tool's capability of covering the processing requirements based on the process descriptions in the Appendix 3. DTU Nanolab will assess whether the submitted samples fulfil the specified evaluation requirements as defined in Appendix 3. Based on the assessment of fulfilments, points are awarded on the above-mentioned scale of 0-10. If the Tenderer has already submitted such demo samples, the Tenderer can refer to such submitted Demo samples instead of providing new samples.

      Evaluation Method

      Based on the assessment of fulfilments, points are awarded on the above-mentioned scale of 0-10.

      Source

      No source found in the documents. Check the weight against the tender documents.

    • Description

      The price to be evaluated is the total price for the machines as well as the options, but not voluntary option, specified in Appendix 2 – Prices.

      Source

      No source found in the documents. Check the weight against the tender documents.

    Previous winners

    • Who are you up against?

      The suppliers who have won similar contracts at Danmarks Tekniske Universitet - DTU

    From the notice

    • DTU requires an ICP reactive ion etcher to etch III-V materials with a special focus on etching GaAs micropillar devices from a planar microcavity (“the Instrument”). The system is expected to be delivered as soon as possible but at the latest in Q3 2026. The Instrument is to be the core instrument for a research project on optical devices. Besides that, it will be part of the shared open access instruments at the facility supporting research in micro and nano fabrication within optical devices and quantum computer developments. Therefore, DTU need a state-of-the-art instrument that can meet all current and future needs for etching III-V materials like GaAs, AlGaAs, InGaAs, AlInGaAsP and InP .

    • Contact

      Anna Storchaasst@dtu.dk
    • Type
      Result
    • Location
      Københavns omegn
    • Main code
      Laboratory, optical and precision equipments (excl. glasses)
      38000000
    • 51430000Installation services of laboratory equipment

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