Search
  • Search

    Silicon deep reactive ion etcher (Si DRIE)

    Danmarks Tekniske Universitet - DTU

    Silicon deep reactive ion etcher (Si DRIE)

    1. Competition notice published

      Aug 26, 2025 1:02 PMAugust 26, 2025 1:02 PM

    2. Supplier selection

      Oct 20, 2025 12:00 AMOctober 20, 2025 12:00 AM

    3. Contract signed

      Dec 1, 2025 12:00 AMDecember 1, 2025 12:00 AM

    4. Result notice published

      Dec 5, 2025 2:12 PMDecember 5, 2025 2:12 PM

    Brief

    Denmark: Tenders/Danmarks Tekniske Universitet - DTU/Silicon deep reactive ion etcher (Si DRIE)

    Awarded

    The competition has ended and a winner has been selected.

    Deadline
    Dec 4, 2025Expired
    Award
    Quality of submitted samples 40% and 1 more
    Procedure
    OpenSingle stage
    Agreement
    Buying goodsover 1 year

    Brief

    Danmarks Tekniske Universitet - DTU har inngått en avtale med Samco Inc om å levere en Silicon deep reactive ion etcher (Si DRIE) for 150 mm waferbehandling, som skal installeres i DTU Nanolab sitt renrom i Københavns omegn. Avtalen har en varighet på 12 måneder og en total verdi på 989 000 €. Det ble lagt vekt på funksjonalitet og ytelse, samt kvaliteten på innsendte prøver.

    Result

    TED
    • Samco Inc
      Winner
    • Number of bids
      3
    • Contract value
      €989,000

    Custom Assessment Criteria

    • Get answers to your bid/no-bid criteria

      Set them up once and Cobrief answers them in every tender

    Will you bid?

    The agent sets up the bid and writes the first draft. Free for 14 days.

    Award Criteria

    • Description

      The sub-criteria "Functionality and performance" is based on the Tenderer's specifications in Appendix 1 - Requirement Specification.

      Source

      No source found in the documents. Check the weight against the tender documents.

    • Description

      Evaluation of the sub-criteria "Quality of submitted samples" will be made based on an evaluation of the received samples.

      Source

      No source found in the documents. Check the weight against the tender documents.

    • Description

      The price to be evaluated is the total price for the machine as well as the options, but not voluntary option, specified in Appendix 2 - Prices.

      Evaluation Method

      DTU uses a linear point scale model to evaluate the tender prices. The linear model implies that the prices offered are converted into points.

      Source

      No source found in the documents. Check the weight against the tender documents.

    Previous winners

    • Who are you up against?

      The suppliers who have won similar contracts at Danmarks Tekniske Universitet - DTU

    From the notice

    • DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.Main features of the procedureOpen Procedure

    • Contact

      Anna Storchaasst@dtu.dk
    • Type
      Result
    • Location
      Københavns omegn
    • Main code
      Laboratory, optical and precision equipments (excl. glasses)
      38000000
    • 51430000Installation services of laboratory equipment

    Similar active competitions

    • Danmarks Tekniske Universitet - DTU

      Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics

      Danmarks Tekniske Universitet - DTU needs an ICP Reactive ion etcher for silicon dielectrics, to be delivered and installed in the DTU Nanolab cleanroom in the Copenhagen area. The instrument must support the full spectrum of etching of silicon-based dielectrics, from sub 100 nm nanostructures to depths of several tens of microns, requiring exceptional process controllability and tunability for ultra-precise, low-rate etches (< 100 nm/min) and high etch rate deep etches (approaching 500 nm/min). It must accommodate all silicon dielectrics of the form SixNy, SixOx, and SixOyNz, and be compatible with mask materials including Si, Cr, e-beam resists, and UV/DUV photoresists with high mask selectivity. The instrument must be configured for 150 mm wafer processing, with an option for a complete kit for 200 mm wafer processing. DTU will also have the option to purchase one additional identical instrument. Award criteria are Functionality and performance (50%), Quality of submitted samples (30%), and Price (20%).

      Competition
      Nov 23, 2026(25 days)

    • Danmarks Tekniske Universitet - DTU

      Laboratorie-, optisk- og presisjonsutstyr

      The procurement of the Supply, Installation and Commissioning of a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) with Gallium Ion Source

      Danmarks Tekniske Universitet (DTU) needs the supply, delivery, installation, commissioning, and acceptance of one focused ion beam scanning electron microscope (FIB-SEM) dual-beam platform. This instrument will serve a multi-user research environment in the Copenhagen area for high-resolution surface imaging, site-specific cross-sectioning, TEM lamella preparation (including automated workflows), 3D FIB-SEM tomography, gas-assisted deposition and etching, nanoscale manipulation, and elemental microanalysis by energy-dispersive X-ray spectroscopy (EDS) and ToF-SIMS. The award criteria are Price (30%) and Quality of the solution (70%). Suppliers must provide at least 3 references for comparable agreements, each with a value of at least DKK 10,000,000, concerning the supply, delivery, installation, commissioning, and acceptance of a FIB-SEM dual-beam platform or a comparable service, with the agreement not being more than 5 years old.

      Competition
      Nov 16, 2026(18 days)

    • Technische Universiteit Eindhoven

      Dielectric Etcher

      Technische Universiteit Eindhoven needs the delivery and installation of a Dielectric Etcher 1 for a duration of 60 months in Zuidoost-Noord-Brabant. The award criteria are Price (30%) and Quality (70%).

      Competition
      Nov 25, 2026(27 days)