Plasma enhanced chemical vapour deposition tool
- Procedure
- Without prior noticeTwo stages
- Agreement
- Buying goodsover 1 year
Brief
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY has entered into an agreement with KLA Corporation for the direct award of a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system. This system is for the deposition of dielectric thin films (SiO₂, SiN, TEOS, SiON, a Si) for research and pilot line use in the VTT Micronova cleanroom, with a duration of 12 months. The direct award was justified because VTT already operates an existing deep reactive ion etching (DRIE) system manufactured by SPTS (now KLA/SPTS), and only the original manufacturer is technically capable of integrating the existing etch chamber with a new system due to proprietary hardware and software rights.
Result
- KLA CorporationWinner
- 0Number of bids
- Not statedContract value
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Description
The total agreed price is a non-variable sum.
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From the notice
THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO#, SiN, TEOS, SiON, a Si) for research and pilot line use in the VTT Micronova cleanroom. DIRECT AWARD, Article 40 2(2) of Finnish Procurement act (1397/2016) The procurement will be carried out as a direct award in accordance with 40 article Section 2(2) of the Finnish Public Procurement Act. According to the 40 § section 2(2) of the Act on Public Contracts (1397/2016), only a certain supplier can implement the procurement for a technical reason, or for a reason related to protecting an exclusive right; it shall be a further condition that there are no reasonable alternatives or substitute solutions, and that the absence of competition is not due to an artificial narrowing of the terms and conditions of the procurement. The justification for direct procurement applies in this case, as VTT already operates an existing deep reactive ion etching (DRIE) system manufactured by SPTS. In order to extend the operational lifetime of the existing etch chamber, and optimize the use of limited cleanroom space, it is necessary to integrate the existing etch chamber with a new system. Due to proprietary hardware and software rights, only the original manufacturer of the existing DRIE system (KLA/SPTS) is technically capable of integrating the etch chamber with newer system configurations. The process tool control software is developed by the equipment manufacturer and is specifically designed for defined system configurations; consequently, it is not transferable to equipment supplied by other manufacturers. Accordingly, no reasonable alternative or substitute solution exists, and the absence of competition is not the result of an artificial restriction of the procurement conditions.
Contact
Teknologian tutkimuskeskus VTT Oykilpailutus@vtt.fi- Result · PrequalificationType
- 38000000Main codeLaboratory, optical and precision equipments (excl. glasses)